Teflon™ Fluoropolymers in Semiconductor Manufacturing

Teflon™ Fluoropolymers Enhance the Connected World from End to End

From bulk chemical distribution to wet etch and planarization processes, chemically inert Teflon™ fluoropolymers enable the equipment and systems needed to deliver high-performance, contamination-free gases and chemicals during the chip manufacturing process.

Teflon™ fluoropolymers provide reliable, high-quality solutions, enabling device manufacturers to maximize chip yields and design freedoms while minimizing downtime and process variability.

These reliable, high quality fluoropolymers offer:

More Reliable Manufacturing. Increased Innovation.
Teflon™ fluoropolymers improve reliability within the semiconductor manufacturing process, freeing manufacturers to create more innovative, reliable devices.

Protecting Microchips from Harm.
The superior chemical resistance of fluoropolymers ensures that highly corrosive chemicals do not contaminate ultra-clean environments during chip fabrication.

Advancing Integrated Circuit Packaging.
Superior electronic performance, like low dielectric constant and low dissipation factor, as well as exceptional UV performance and moisture resistance, are essential to advanced wafer level packaging.

Real-Time Improvements to Operation Efficiency.
The more data that devices can share, the smarter and more efficient the IoT becomes. Transportation, buildings, and infrastructures that share real-time information help reduce energy consumption, congestion, hazards, and operational costs.

Constantly Adapting to the IoT Evolution.
Chemours’ commitment to product innovation means that Teflon™ fluoropolymers will continue evolving to meet changing industry requirements and demands for better-performing processes. The variety of product types (resins, coatings, dispersions, films) in the Teflon™ fluoropolymer family provides a broad range of world-class products that enables the fabrication of semiconductor materials.

Boosting Reliability and Efficiency in Semiconductor Manufacturing

Ultra-high purity chemicals and solvents used in semiconductor manufacturing require systems and equipment that are able to resist corrosion and leaching, which can introduce contaminants. Teflon™ fluoropolymers allow components in high-purity fluid handling systems to remain corrosion- and impurity-free.

These components include:

• Process vessels
• Pipes and fittings
• Tubing
• Valves and pumps
• Storage and transport containers
• Filters
• Sensors

Fluoropolymer resins offer major advances in flex life, chemical stress crack resistance, and weldability for components that handle high-purity fluids. Products like Teflon™ polytetrafluoroethylene (PTFE) and perfluoroalkoxy (PFA) are nonreactive with virtually all chemicals. In fact, the chemical structure of Teflon™ PFA HP resins provides the lowest level of extractables to protect chip yields.

Components and tools manufactured from Teflon™ products perform well even after lengthy exposure to highly reactive chemicals. In integrated circuit manufacturing, components made with Teflon™ products prevent fluid contamination use after use, keeping process yields high and performance consistent.

Specific Teflon™ Fluoropolymer Products for Each Process Within Semiconductor Manufacturing

Semiconductor manufacturing involves many intricate processes. Each Teflon™ fluoropolymer product is designed to uphold the highest standards in purity, reliability, and endurance.

High Purity in Critical Applications

The presence of even the smallest trace impurities or certain elemental materials creates significant impact to device yields. Understand the key role fluoropolymers play in chip manufacturing. Learn more.