Protecting Component Purity During Semiconductor Wet Processing
Critical process tools and fluid delivery systems use wetted components made from Teflon™ fluoropolymer resins to prevent contamination. During wet processing, semiconductor wafers are cleaned, etched, and then cleaned again to remove photoresist and residuals that accumulate during the etching process. The unmatched chemical resistance of Teflon™ fluoropolymers protects both process fluids and wafer surfaces from exposure to impurities and contamination.
The use of Teflon™ high-purity perfluoroalkoxy (PFA) resins—PFA HP and HP Plus—prevents contamination of ultra-pure and aggressive fluids in tubing systems within wet etch process tools. Teflon™ PFA components are joined via welding or with flare-type connections. Dual containment constructions provide added protection against leaks and contamination.
Fluid Handling Components
Valves and fittings made from high-purity Teflon™ PFA and polytetrafluoroethylene (PTFE) resins ensure the highest performance of critical connections in wet etch fluid transfer. Components like pumps, pressure regulators, and flow meters use Teflon™ resins to ensure protection against contamination and impurities.
Baths and Sinks
Wet etch tool components like baths and sinks made from Teflon™ PFA and PTFE resins help prevent contamination of process fluids and wafer surfaces. Components molded from Teflon™ PFA HP resin also resist breakage better than quartz components.
Molded to form wafer baskets and other wetting components that support wafers during wet processing, Teflon™ PFA HP and HP Plus resins impart chemical resistance and high purity to prevent contamination that impacts yields.
Tanks and Containers
The compatibility of Teflon™ resins with virtually all chemicals improves their ability to protect fluid purity. Both Teflon™ PFA HP and PTFE resins can be used to line or form tanks and containers that store and dispense ultra-pure aggressive chemical fluids. Teflon™ resins are also used to line metal and reinforced plastic tanks.
Capacitive sensors protected by high-purity Teflon™ PFA resins can monitor the fluid levels of the harshest and most reactive chemicals. Teflon™ fluoropolymers can insulate electrical components and cabling, providing additional protection against corrosion and contamination.
Teflon™ PTFE resin is essential for high-purity filtration membranes, which are critical to removing particulate contamination from process fluids and gases. Teflon™ PFA HP and HP Plus resins can also be processed and used as filter housings and fittings.